| 摘要 |
PROBLEM TO BE SOLVED: To provide a droplet measuring method which can decide whether a desired amount of a droplet of a functional liquid has been discharged on a predetermined position on a substrate or not. SOLUTION: After the stop of the irradiation of illumination light R by an illuminator 13 (light source shutoff), photographing is performed after a lapse of predetermined time. An image of the luminescence of the entire droplet L irradiated with the illumination light R is photographed by a photographing apparatus 12. The amount of droplet of the droplet L is calculated by processing its image data. COPYRIGHT: (C)2007,JPO&INPIT
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