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发明名称
METHOD FOR MEASURING SIDE WALL ANGLE OF PHOTO-RESIST PATTERN USING SEM
摘要
申请公布号
KR20060074537(A)
申请公布日期
2006.07.03
申请号
KR20040113293
申请日期
2004.12.27
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
JI, MYUNG SUNG
分类号
H01L21/66;H01L21/027
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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