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发明名称
METHOD FOR FORMING INORGANIC THIN FILM PATTERN ON POLYIMIDE RESIN
摘要
申请公布号
KR20060074869(A)
申请公布日期
2006.07.03
申请号
KR20050129719
申请日期
2005.12.26
申请人
MITSUBOSHI BELTING LTD.;TOYOTA JIDOSHA KABUSHIKI KAISHA
发明人
YANAGIMOTO HIROSHI;NAWAFUNE HIDEMI;AKAMATSU KENSUKE
分类号
G03F7/00;H01L21/027
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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