Alignment mark and aligning method,申请号KR20040041988-传众专利搜索

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发明名称	Alignment mark and aligning method
摘要
申请公布号	KR100596270(B1)	申请公布日期	2006.07.03
申请号	KR20040041988	申请日期	2004.06.08
申请人		发明人
分类号	H01L21/027;H01L23/544	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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