| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface treatment method and surface treatment equipment for flat shaped objects where flat shaped objects can be securely and smoothly carried into a treatment solution in a treatment tank in the state of a vertically hanging form. SOLUTION: A pair of overflow tanks are oppositely arranged in such a manner that respective inside rising partitions are confronted with a carrying passage held to form a downward fluidizing solution chamber and an upward fluidizing solution chamber. The downward fluidizing solution chamber is formed in such a manner that a treatment solution Qsp fed from an upper side opening part can be continuously fluidized downward, and also, the upward fluidizing solution chamber is formed in such a manner that the treatment solution Qsp refed from the lower side can be continuously fluidized upward. A rotary tank and a solution recirculation means are provided so as to be formed in such a manner that flat shaped objects can be carried into the continuously fluidizing treatment solution through an opening part for carrying-in, the flat shaped objects after treatment can be carried out from the inside of the continuously fluidizing treatment solution through an opening part for carrying-out, and also, in the process of their carrying into the downward fluidizing solution chamber, surface treatment therefor can be performed using the downward continuous fluidizing treatment solution. COPYRIGHT: (C)2006,JPO&NCIPI
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