| 摘要 |
A confocal optical device and a spherical-aberration correction method are provided which reduce the generation of a spherical aberration. This confocal optical device includes: a drive mechanism which moves a sample board so as to change the distance between an objective lens and the sample board; a spherical-aberration correction element which is disposed between a light source and the objective lens; a reference-position detection section which, based on a detection result by a photo-detector, detects the position of the sample board when the focal position of the objective lens coincides with the surface of the sample; a movement-distance derivation section which, based on a detection result by the photo-detector, calculates a distance by which the sample board is moved until the focal position of the objective lens coincides with an object to be measured inside of the sample, and derives the depth at which the measured object is located in the sample; and a correction control section which controls the spherical-aberration correction element according to the inside-sample depth of the measured object.
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