| 摘要 |
PROBLEM TO BE SOLVED: To prevent degradation of operation efficiency by a simplified moving mechanism of at least either of an observation device or a processing device. SOLUTION: The composite apparatus provided with a sample stage 7 for holding a sample 6 comprises a sample stage moving means for moving the sample stage 7 in a periphery of an observation position of the observation device and a processing position of the processing device, a sample moving means for moving the sample 6 to the observation position or the processing position on the sample stage 7, and a means for maintaining a relative positional relation between the sample 6 and the sample stage 7 even when the sample stage 7 is moving, and further comprises a means for adjusting a position to the observation position or the processing position when the sample stage 7 stops. COPYRIGHT: (C)2006,JPO&NCIPI
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