| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem, wherein a method of serially connecting vibrators is ineffective for an object, such as a wafer that requires a large area and a high load, particularly in a jointing apparatus or a molding apparatus, even though the method has been employed conventionally. SOLUTION: Connecting a plurality of piezo actuators in parallel yields increased energy and enables large-area vibration. In addition, arranging a plurality of the actuators enables prevention of bending and also to vibrate a large area under high load and increasing the energy. Furthermore, a three-dimensional operation becomes possible. This is effective for lowering the loads and reduce voids at joints; in nano-level molding equipment, allows vibration to operate effectively, when molding or stripping the mold, and provides a structure effective for the objects, intended for both of the two apparatuses mainly to deal with, such as wafers for which large areas and high loads are required. COPYRIGHT: (C)2006,JPO&NCIPI
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