PLUME MEASUREMENT METHOD, PLUME EVALUATION METHOD, LASER ABLATION METHOD, AND LASER ABLATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a plume measurement method, a plume evaluation method, a laser ablation method, and a laser ablation apparatus for depositing a thin film having consistent crystallinity or consistent characteristic with excellent reproducibility by laser ablation. SOLUTION: When a target material is instantaneously evaporated by irradiating a target 2 in a chamber 1 with pulse laser beams 4, and a thin film of an evaporation material is deposited on a substrate 3 facing the target, the size and the shape of the plume 5 generated when irradiating the target 2 with the laser beams 4 are acquired in a matrix form as digital information of the light intensity. COPYRIGHT: (C)2006,JPO&NCIPI