PLASMA SYSTEM

摘要

A non-equilibrium atmospheric pressure plasma incorporating an atomised surface treatment agent is generated by applying a radio frequency high voltage to at least one electrode positioned within a dielectric housing while causing a process gas to flow from the inlet of the housing past the electrode to the outlet. The voltage applied is sufficiently high to generate a non-equilibrium atmospheric pressure plasma extending from the electrode at least to the outlet of the housing. The electrode may be combined with an atomiser for the surface treatment agent within the housing. The electrode may comprise a radioactive material. The surface to be treated can be positioned adjacent to the plasma outlet so that the surface is in contact with the plasma, and moved relative to the plasma outlet.