| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator mechanism and a shutter which can simply and precisely stop the piece moving at high speed at a predetermined position. SOLUTION: This electrostatic actuator mechanism has a fixed member (1) having a plurality of drive electrodes (4) formed on its surface and a moving member (2) which can move relative to the fixed member, and drives the moving member by the electrostatic force generated when a cyclic voltage is applied to the drive electrodes. Further, it has an auxiliary electrode 43 to brake the moving member when it comes close to the stop end. COPYRIGHT: (C)2006,JPO&NCIPI
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