发明名称 System and method for improving spatial resolution of electron holography
摘要 A method for enhancing spatial resolution of a transmission electron microscopy TEM) system configured for electron holography. In an exemplary embodiment, the method includes configuring a first lens to form an initial virtual source with respect to an incident parallel beam, the initial virtual source positioned at a back focal plane of said first lens. A second lens is configured to form an intermediate virtual source with respect to the incident parallel beam, the position of said intermediate virtual source being dependent upon a focal length of the first lens and a focal length of the second lens. A third lens is configured to form a final virtual source with respect to the incident parallel beam, wherein the third lens has a focal length such that a front focal plane of the third lens lies beyond the position of the intermediate virtual source, with respect to a biprism location.
申请公布号 US2006097167(A1) 申请公布日期 2006.05.11
申请号 US20040972696 申请日期 2004.10.25
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 DOMENICUCCI ANTHONY G.;WANG YUN-YU
分类号 G21K7/00 主分类号 G21K7/00
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