LIQUID-COOLING MICROWAVE PLASMA APPLICATOR FOR MICROWAVE PLASMA SYSTEM AND LIQUID-COOLING DIELECTRIC WINDOW

摘要

PROBLEM TO BE SOLVED: To provide a liquid-cooling plasma applicator for a microwave plasma system using a microwave-absorbing liquid, and a liquid-cooling dielectric window.

SOLUTION: The applicator is equipped with a discharge tube 50 almost transmitting microwave energy and a cooling member 60 covering a tube demarcating a channel 68 and a medium. The channel 68 is formed along the inner surface of the member, and covers the outer surface of the tube to carry a microwave-absorbing cooling liquid to the outer surface of the tube, whereby an electric field enters the tube by the medium adjoining to the channel 68, and plasma can be maintained in the tube while the liquid flows through the channel. The window includes the dielectric window, the channel and the cooling member contacting with the outer surface of the window demarcating the adjoining medium to the channel.

COPYRIGHT: (C)2006,JPO&NCIPI