发明名称 |
HEMI-SPHERICAL STRUCTURE AND METHOD FOR FABRICATING THE SAME |
摘要 |
Hemi-spherical structure and method for fabricating the same. A device includes discrete pillar regions on a substrate, and a pattern layer on the discrete support structures and the substrate. The pattern layer has hemi-spherical film regions on the discrete support structures respectively, and planarized portions on the substrate between the hemi-spherical film regions. Each of the hemi-spherical film regions in a position corresponding to each of the support structures serves as a hemispherical structure.
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申请公布号 |
US2008166883(A1) |
申请公布日期 |
2008.07.10 |
申请号 |
US20080048006 |
申请日期 |
2008.03.13 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
LIU MING-CHYI;LO CHI-HSIN |
分类号 |
H01L21/31 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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