| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holder which makes it possible to take a substrate out of it easily and securely. SOLUTION: In the substrate holder where a substrate W is interposed between a fixed holding member 54 and a movable holding member 58 mounted with a sealing member 60, the movable holding member 58 is pressed against the fixed holding member 54, the region surrounding the peripheral edge portion of the substrate W is sealed with the sealing member 60, and the substrate W is held freely attachably/detachably, the fixed holding member 54 is mounted with a springly leaf spring member 96, which has a free end 96a positioned inwardly of an outer circumferential portion of the substrate when the substrate is held between the fixed holding member 54 and the movable holding member 58, and positioned outwardly of the outer circumferential portion of the substrate when the holding of the substrate between the fixed holding member 54 and the movable holding member 58 is released. COPYRIGHT: (C)2008,JPO&INPIT
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