PIEZOELECTRIC ELEMENT, MANUFACTURING METHOD THEREFOR, OSCILLATORY TYPE GYRO SENSOR, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of minimizing the difference in leakage current, to at least two detection lead electrodes from a drive lead electrode.

SOLUTION: The piezoelectric element 100 is provided with a first lead electrode 55 connected to a first detection electrode 6b; a second lead electrode 65 connected to a second detection electrode 6c; a third lead electrode 75 connected to a drive electrode 6a; and a reference lead electrode 85 connected to a reference electrode 104a (Fig.3). The area of the first lead electrode 55 (combined area of a first lead wire 51 and a first pad 52) and the area of the second lead electrode 65 (combined area of a second lead wire 61 and a second pad 62) are formed, in such a way as to have substantially the identical area.

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