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发明名称
METHOD FOR PRODUCING SETS OF PHOTOMASK HAVING ACCURATE REGISTRATION
摘要
申请公布号
US3477848(A)
申请公布日期
1969.11.11
申请号
USD3477848
申请日期
1964.12.14
申请人
TEXAS INSTRUMENTS INC.
发明人
JOHN P. PRITCHARD JR.
分类号
C23F1/02;G03F7/20;G11C15/06;H01L21/00;H01L27/00;H01L39/24;H01L49/02;(IPC1-7):G03C5/04
主分类号
C23F1/02
代理机构
代理人
主权项
地址
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