发明名称 METHOD FOR MANUFACTURING ANION EXCHANGE RESIN, ANION EXCHANGE, MIXED BED RESIN AND METHOD FOR MANUFACTURING ULTRAPURE WATER FOR CLEANING ELECTRIC APPLIANCE/MATERIAL
摘要 <P>PROBLEM TO BE SOLVED: To provide an anion exchange resin which develops little eluate and hardly deteriorates the even degree of the surface of a silicon wafer. <P>SOLUTION: The method for manufacturing the anion exchange resin includes the process of contacting a water-soluble polymer containing an anionic dissociation group, while the amount of contact of the water-soluble polymer is 0.01-10 mmol/L as the amount of the anionic dissociation group of the water-soluble to the anion exchange of 1 litter, and the even degree Rms of the surface of the wafer is 4 &angst; or less which is requested by a silicon wafer test for the obtained anion exchange resin. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008264670(A) 申请公布日期 2008.11.06
申请号 JP20070110654 申请日期 2007.04.19
申请人 KURITA WATER IND LTD;MITSUBISHI CHEMICALS CORP 发明人 FUKUI NAGAO;MIZUNIWA TETSUO;TOKUNAGA KAZUHIKO;YASUTOMI MASAKO
分类号 B01J41/12;B01J47/04;C02F1/42;C08J5/20 主分类号 B01J41/12
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