发明名称 |
METHOD FOR MANUFACTURING ANION EXCHANGE RESIN, ANION EXCHANGE, MIXED BED RESIN AND METHOD FOR MANUFACTURING ULTRAPURE WATER FOR CLEANING ELECTRIC APPLIANCE/MATERIAL |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide an anion exchange resin which develops little eluate and hardly deteriorates the even degree of the surface of a silicon wafer. <P>SOLUTION: The method for manufacturing the anion exchange resin includes the process of contacting a water-soluble polymer containing an anionic dissociation group, while the amount of contact of the water-soluble polymer is 0.01-10 mmol/L as the amount of the anionic dissociation group of the water-soluble to the anion exchange of 1 litter, and the even degree Rms of the surface of the wafer is 4 Å or less which is requested by a silicon wafer test for the obtained anion exchange resin. <P>COPYRIGHT: (C)2009,JPO&INPIT |
申请公布号 |
JP2008264670(A) |
申请公布日期 |
2008.11.06 |
申请号 |
JP20070110654 |
申请日期 |
2007.04.19 |
申请人 |
KURITA WATER IND LTD;MITSUBISHI CHEMICALS CORP |
发明人 |
FUKUI NAGAO;MIZUNIWA TETSUO;TOKUNAGA KAZUHIKO;YASUTOMI MASAKO |
分类号 |
B01J41/12;B01J47/04;C02F1/42;C08J5/20 |
主分类号 |
B01J41/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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