| 摘要 |
A device for preventing error of the SMIF system is provided to prevent the damage of wafer and SMIF system by performing an interlock function using the detection means. A device for preventing the error of the SMIF system comprises a processing tool and a SMIF system. The processing tool comprises the door which opens and closes the gateway of the wafer cassette while being slid to the upward and downward. The SMIF system unloads the wafer or the wafer cassette to be processed in the processing tool. The detection means(24) senses the presence of object in the gateway of the processing tool when the door is closed. The relay(41) has the connection contact point and the closing contact point and is driven according to the object sensing of the detection means. The door open means is made of the solenoid valve for the solenoid valve for the door closing connected to the connection contact point and the door open connected to the closing contact point.
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