发明名称 METHOD AND APPARATUS FOR DETECT SOLUTION AMOUNT
摘要 The apparatus and method of detecting the amount of solution are provided to detect the solution amount in case operator is unable to confirm the kind of the solution within the container. The apparatus of detecting the amount of solution comprises the sine wave generation circuit part(100), the variable resistance part(120), the electrostatic capacity generating unit(130), the amplifier(150), the MICOM(160). The sine wave generation circuit part generates the set sinusoidal wave. To detect the solution amount in the container, the variable resistance part adjusts the output voltage value in the first reference conditions to the output voltage value in the first reference conditions stored within MICOM. The electrostatic capacity generating unit is connected in parallel with the variable resistance part. The electrostatic capacity generating unit is set up identically with the height of the full state of the solution. The electrostatic capacity generating unit is comprised of the anode having a regular separation distance. The electrostatic capacity generating unit generates the electrostatic capacity and the output voltage according to the solution amount within the container. The amplifier amplifies the output generated by the variable resistance part and electrostatic capacity generating unit. The MICOM stores the graph illustrated based on the output voltage value according to the solution amount within container.
申请公布号 KR100872084(B1) 申请公布日期 2008.12.15
申请号 KR20070109313 申请日期 2007.10.30
申请人 UNION MATERIAL TEHC CO., LTD. 发明人 KIM, SUN KYOUNG
分类号 H01L21/30;G01F11/00;H01L21/66 主分类号 H01L21/30
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