| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem being unsuitable for use in an electron microscope, since conventional microscope slides are charged due to incidence of charged particle beams when it is observed in the electron microscope, in about a relation to the use of the optical microscope slide (10) in a charged particle device such as an electron microscope or a focused ion beam device. SOLUTION: However, a microscope slide coated with a conductive layer such as Indium Tin Oxide (ITO) exists. The microscope slide is normally used for heating an object mounted on it by flowing a current through the conductive layer. Experiments show that these microscope slides can be used advantageously in a charged particle device by connecting the conductive layer to ground potential, thereby forming a return path for the incident charged particles, thus preventing charging. Furthermore, the invention also relates to a charged particle device equipped with an optical microscope (130). COPYRIGHT: (C)2009,JPO&INPIT
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