| 摘要 |
PROBLEM TO BE SOLVED: To suppress dissipating vibrational energy of a piezoelectric resonant part from a portion supporting a piezoelectric body at the end of a cavity section to a substrate side so as to enhance a Q value as a quality factor of the thin film piezoelectric resonator. SOLUTION: This thin film piezoelectric resonator includes a piezoelectric resonant part 11 of which the piezoelectric film 6 is sandwiched with a lower electrode 5 and an upper electrode 7, a substrate 1 disposed opposite to the piezoelectric resonant part 11 through a space and in a lower electrode 5 side, at least a high acoustic impedance layer made from material with an acoustic impedance higher than that of the substrate 1 and the piezoelectric film 6, and a support 3 of a cyclic structure which connects an end or its vicinity of the piezoelectric resonant part 11 with the substrate. COPYRIGHT: (C)2009,JPO&INPIT
|
