ELECTRON EMITTING ELEMENT, ELECTRON GUN, AND ELECTRONIC BEAM APPLICATION DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an electron emitting element and an electron gun which has a long service life, a high luminance and a narrow energy width, and to provide an electron microscope and an electron beam lithography device with a high luminance and a high resolution, which are equipped with the electron emitting element and the electron gun.

SOLUTION: The electron emitting element is made of a tubular substance having carbon as a main component and a wall thickness of a tube is thin and a suitable substance is filled in a hollow portion of the tube. As a result, a stable large diameter tubular structure can be achieved and an energy dispersion effect can be reduced and an electron gun having a narrow energy width and a long service life can be obtained.

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