| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage positioning device moving a stage to a target position highly accurately at high speed and then stopping it there. SOLUTION: A target moving quantity RI of the stage from a present position to a target position is calculated by a stage position detection device at a movement start position, and a correction target moving quantity R2 by which an actual moving quantity Y1 of the stage agrees with the target moving quantity RI, is calculated based on moving quantity error information showing a relation between the target moving quantity and the actual moving quantity. The stage is moved as much as R1 by driving the stage with the correction target moving quantity R2, to thereby perform highly-accurate and high-speed positioning. COPYRIGHT: (C)2009,JPO&INPIT |
