A MEMS microphone has a backplate with a given backplate aperture, and a diaphragm having a diaphragm aperture. The given backplate aperture is substantially aligned with the diaphragm aperture.
申请公布号
US2008304681(A1)
申请公布日期
2008.12.11
申请号
US20080133599
申请日期
2008.06.05
申请人
ANALOG DEVICES, INC.
发明人
LANGLOIS ERIC;CHEN THOMAS;ZHANG XIN;HARNEY KIERAN P.
