METHOD OF MANUFACTURING ORGANIC THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an organic thin film having a desirous productivity and controllable of film quality, film thickness and crystallographic properties. SOLUTION: When manufacturing of organic thin films is launched using a variety of organic semiconductors primarily including acene-based polycyclic aromatic hydrocarbon such as anthracene, tetracene and pentacene, the following processing steps are performed: a solute dissolution step of dissolving the organic solute in supercritical carbon dioxide solvent phase at a solute dissolution temperature and at a solute dissolution pressure to produce a supercritical solute dissolution phase and a jetting step of jetting the supercritical solute dissolution phase from a nozzle onto a substrate and precipitating the organic solute on the substrate to form an organic thin film. It is preferred that the solute dissolution temperature is equal to or higher than the critical temperature of the solvent and the solute dissolution pressure is equal to or higher than 10 MPa. COPYRIGHT: (C)2009,JPO&INPIT