| 摘要 |
PROBLEM TO BE SOLVED: To reduce the time required for testing a semiconductor device. SOLUTION: The testing system of the semiconductor device has an irradiation apparatus for irradiating the semiconductor device with a beam; a testing apparatus for judging in the testing terms of the semiconductor device whether the semiconductor device is good or bad; an information processing portion wherein its good or bad value obtained in its each testing term is set as the good or bad value of an irradiation region which is irradiated with the beam during a term from start to end of each testing term, and the defection region of the semiconductor device is specified based on the continuous number whereby the good-value region or the bad-value region continues in the direction orthogonal to that of the scanning of the beam; and a display portion for displaying a two-dimension image whereby the irradiation place of the beam and the defection region of the semiconductor device are associated with each other. COPYRIGHT: (C)2009,JPO&INPIT
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