发明名称 IMAGE SENSOR AND METHOD FOR MANUFACTURING THEREOF
摘要 The image sensor and manufacturing method thereof are provided to prevent the leakage current by performing the plasma process on the second conductive type conductive layer and improved the photosensitivity. The image sensor comprises the substrate(110), the bottom electrode(130), the intrinsic layer(150), the second conductive type conductive layer(160), the diffusion barrier(170), the top transparent electrode(180). The substrate comprises the circuitry. The bottom electrode is successively formed in the top of the substrate. The diffusion barrier is formed on the second conductive type conductive layer. The top transparent electrode is formed on the diffusion barrier.
申请公布号 KR100871981(B1) 申请公布日期 2008.12.08
申请号 KR20070062009 申请日期 2007.06.25
申请人 DONGBU HITEK CO., LTD. 发明人 JUNG, OH JIN
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
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