| 摘要 |
PROBLEM TO BE SOLVED: To prevent contamination of plate-like workpieces stored in a storage chamber. SOLUTION: A carriage body 3 is provided with the storage chamber 21 for storing a carrier 2, an air feed face 21F of the storage chamber 21 is provided with a dispersing air feed part 24 for uniformly discharging clean air A over the entire surface of a lamination gap Wd of the plate-like workpieces W held in the carrier 2. An exhaust face 21R of the storage chamber 21 is provided with a dispersion exhaust part 25 for uniformly discharging the clean air A, after passing through the lamination gap Wd. A take-in/take-out port 13, having a shutter 12, is formed on each of right and left side faces of the storage chamber 12. An exhaust port for discharging the clean air A from the dispersion exhaust part 25 toward a ventilation floor is provided on the bottom part of the carriage body 3. COPYRIGHT: (C)2009,JPO&INPIT |
