发明名称 |
DEFECT INSPECTION SYSTEM AND METHOD OF THE SAME |
摘要 |
In an inspection subject substrate, there is a problem that a defect signal is overlooked due to scattered light from a pattern and sensitivity decreases in an irregular circuit pattern part. The inventors propose a defect inspection method, characterized by comprising: an illumination step of guiding light emitted from a light source to a predetermined area on an inspection subject substrate under a plurality of predetermined optical conditions; a detection step of obtaining an electric signal by guiding scattered light components propagating in a predetermined range of azimuthal angle and in a predetermined range of elevation angle to a detector for each of a plurality of scattered light distributions occurred correspondingly to the plurality of optical conditions in the predetermined area; and a defect determination step of determining a defect based on the plurality of electric signals obtained in the detection step.
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申请公布号 |
US2008297783(A1) |
申请公布日期 |
2008.12.04 |
申请号 |
US20080109363 |
申请日期 |
2008.04.25 |
申请人 |
URANO YUTA;SAKAI KAORU;MAEDA SHUNJI |
发明人 |
URANO YUTA;SAKAI KAORU;MAEDA SHUNJI |
分类号 |
G01N21/88 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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