SUBSTRATE-INSPECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate-inspecting device achieving size reduction and enabling high-accuracy inspection for defects on a target substrate with high efficiency. SOLUTION: The coordinates of the position of a defective part are detected by a position-coordinate detecting unit from amounts of displacement in X and Y directions of reflectors obtained, when a substrate holder for holding the rectangular target substrate is raised to have a predetermined angle for visual observation from a horizontal state; the upper surface of the target substrate is irradiated with macroscopic illumination light from above in this state; laser beams emitted from a laser light source are split to direct in the X and Y directions by a light path splitting means; the split laser beams are reflected toward the target substrate by these two reflectors movably provided on X-direction and Y-direction guide members; and the reflectors are moved in the X and Y directions and the laser beams are reflected by the reflectors to be focused on the defective part on the target substrate. COPYRIGHT: (C)2009,JPO&INPIT