| 摘要 |
The invention relates to an apparatus where the sample (4) is placed between an optical microscope (130) and an SEM column (102) on an optical microscope slide (10). Conventional microscope slides are not fit for use in an electron microscope as they are insulating and would thus charge when viewed in an electron microscope due to the impinging beam of charged particles. However, microscope slides exist that show a coating with a conductive layer of e.g. Indium Tin Oxide (ITO). Said microscope slides are normally used for heating the object mounted on the slide by passing a current through the conductive layer. Such a microscope slide (10) is also used in the apparatus of the invention, by connecting the conductive layer to e.g. ground potential, thereby forming a return path for the impinging charged particles and thus avoiding charging.
|
