VAPOR DEPOSITION BOAT AND VAPOR DEPOSITION APPARATUS

摘要

PROBLEM TO BE SOLVED: To deposit a thin film having excellent film thickness uniformity by an vapor deposition process. SOLUTION: The vapor deposition boat EB is used for evaporating a vapor deposition material in an vapor deposition apparatus, and the vapor deposition boat is equipped with: a resistance heating element having in its upper face TS a recessed part RS formed by a nonmetallic material and to be supplied with the vapor deposition material; a pair of electrodes ED1 and ED2 arranged so as to sandwich the recessed part RS of the resistance heating element HR; and a coating body CB formed by a metallic material and arranged between the recessed part RS and at least either electrode ED1 in the upper face TS of the resistance heating element HR. COPYRIGHT: (C)2009,JPO&INPIT