| 摘要 |
PROBLEM TO BE SOLVED: To provide an edge detector capable of detecting accurately an edge portion of a shielding object, even when an ambient temperature in a measuring space is fluctuated or even when characteristics are dispersed in respective constitutive components when produced. SOLUTION: This edge detector is provided with: a laser light source for generating a monochomatic light; a light projection part composed of a light projection lens for converting the monochomatic light from the laser light source into a monochromatic parallel beam, and a light projection window for emitting the monochromatic parallel beam; a photoreception window provided opposedly to the light projection window; a photoreception part composed of a light diffusion element for diffusing the monochromatic parallel beam incident from the photoreception window over a prescribed range, and a line sensor arrayed unidirectionally, at a prescribed pitch, with a plurality of photoreception cells for receiving the diffused monochomatic light; and a detecting part for analyzing a photoreception quantity distribution of the line sensor to detect the edge position in an arrayed direction of the photoreception cells of the shielding object existing in an optical path of the monochromatic parallel beam. COPYRIGHT: (C)2009,JPO&INPIT
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