发明名称 METHOD FOR NON-ORGANIC MATERIAL SEDIMENTATION FROM REACTION SOLUTION, AND DEVICE FOR METHOD IMPLEMENTATION
摘要 FIELD: chemistry. ^ SUBSTANCE: method for non-organic material sedimentation from reaction solution to a substrate by chemical processing involves substrate activation for non-organic material build-up, submersion of substrate into reaction solution for sedimentation of the non-organic material onto the substrate, and reaction solution regeneration, with substrate submerged in the solution, by adding the same non-organic material to reaction solution to maintain continuous non-organic material build-up on the substrate. Device for non-organic material sedimentation on substrate includes first basin with reaction solution, substrate, second basin with silica dosage, and means for silica insertion to the solution. ^ EFFECT: maintenance of continuous sedimentation process. ^ 15 cl, 2 dwg
申请公布号 RU2340039(C2) 申请公布日期 2008.11.27
申请号 RU20050119304 申请日期 2003.11.18
申请人 UIL'JAM MARSH RAJS JUNIVESITI 发明人 BARRON EHNDRJU R.;UITSITT EHLIZABET EHNN
分类号 H01L21/316;C23C8/02;C23C8/40;C23C18/00 主分类号 H01L21/316
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