| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma processor and a plasma processing method, wherein Na generation is reduced when quartz glass, etc., are used as a dielectric component. SOLUTION: The plasma processor has: the dielectric component containing an impurity element which becomes a positive ion and a movable ion; a vacuum container partially sealed by use of the dielectric component; a means for leading a gas into the vacuum container to adjust an internal pressure of the vacuum container; a means for radiating an electromagnetic wave into the vacuum container via the dielectric component; and a means for holding a processing body. The plasma processor generates a plasma in the vacuum container and processes the processing body by use of the plasma. An electrode is arranged on the opposite side of a face coming into contact with the plasma of the dielectric component, and a more negative DC potential than a floating potential of the face where the dielectric component comes into contact with the plasma is applied to the electrode, thereby reducing the generation of Na. COPYRIGHT: (C)2009,JPO&INPIT
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