| 摘要 |
A method for calculating correction factors for reducing positional errors in resistance measurements using a probe having four probe arms includes: positioning the probe anus to contact a test sample; selecting a first set of first and second probe arms and a second set of third and fourth probe arms; applying a first current from the first to the second probe arms of the first set, through the sample; detecting a first voltage between the third and fourth probe arms of the second set; calculating a first resistance as a ratio of the first voltage and the first current; selecting a third set of first and second probe arms including no more than one of the probe arms of the first set, and a fourth set of third and fourth probe arms including no more than one of the probe arms of the second set; applying a second current from the first to the second probe arms of the third set, through the sample; detecting a second voltage at the third and fourth probe arms of the fourth set; calculating a second resistance as a ratio of the second voltage and the second current; and calculating a correction factor based on the first and second resistances.
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