发明名称 METHOD FOR MANUFACTURING REFLECTION OPTICAL ELEMENT
摘要 PROBLEM TO BE SOLVED: To prevent the generation of strain in an optical reflection surface due to the anisotropic deformation caused by rotation or sliding of crystal or crystal orientation during plastic deformation, in a process for press-forming a reflection optical element composed of an amorphous metal. SOLUTION: After heating a mold having an upper mold member 3 and a lower mold member 4 to a temperature in a supercooled liquid range (ΔT=Tx-Tg) of an amorphous metal having a glass transition point (Tg) and a crystallization temperature (Tx), hot molding is started, and then stress is released at a (Tg-10K) point or lower. The shape of a blank W in the mold is maintained and at the same time, the surface roughness of the mold is transferred in atomic level during heating. Thereby, a molding having high shape accuracy and surface accuracy can be obtained. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008286972(A) 申请公布日期 2008.11.27
申请号 JP20070131306 申请日期 2007.05.17
申请人 CANON INC 发明人 ISHIZUKA KEIICHI
分类号 G02B5/08 主分类号 G02B5/08
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