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发明名称
摘要
申请公布号	JP4187357(B2)	申请公布日期	2008.11.26
申请号	JP19990208819	申请日期	1999.07.23
申请人		发明人
分类号	C09K13/04;H01L21/308;C09K13/06;G02F1/1343	主分类号	C09K13/04
代理机构		代理人
主权项
地址

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