| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of fabricating or preparing an optical component, such as a mirror, using an amorphous oxide coated substrate. <P>SOLUTION: An amorphous oxide coating is applied to an optical substrate. Assessment of surface roughness of the coated surface is performed. The coated surface is polished based on the assessment. Initial assessment is conducted and polishing can be performed based on the initial assessment prior to applying the coating to prepare the better surface for the coating. Each assessment can assess surface's Mid-Spatial Frequency Roughness(MSFR), High-Spatial Frequency Roughness (HSFR) or both. Execution of the assessment, the polishing and/or the coating can be computer-controlled. This process is ideal in the fabrication of the optical component formed from the substrate with a near-zero coefficient of thermal expansion. The optical component fabricated in this manner is also provided. <P>COPYRIGHT: (C)2009,JPO&INPIT |
