BATCH EQUIPMENT ROBOTS AND METHODS OF STACK TO ARRAY WORK-PIECE TRANSFER
摘要
<p>The present invention generally comprises equipment for an automated high volume batch work-piece manufacturing factory comprising work-piece handling and work-piece processing in a high productivity factory architecture capable of producing 1,000 or more work-piece an hour. The work-pieces may be presented to the equipment from a stacked supply to a parallel array. Additionally, the work- pieces may be transferred between manufacturing architectures by an array to array batch transfer. The work-pieces may be transferred within the manufacturing architecture in a parallel to parallel batch transfer operation. The robotic operations may be between robotic devices, between robotic devices and processing equipment, and within processing equipment.</p>
申请公布号
WO2008141194(A1)
申请公布日期
2008.11.20
申请号
WO2008US63264
申请日期
2008.05.09
申请人
APPLIED MATERIALS, INC.;BACHRACH, ROBERT, Z.;TEPMAN, AVI;POLYAK, ALEXANDER, S.
发明人
BACHRACH, ROBERT, Z.;TEPMAN, AVI;POLYAK, ALEXANDER, S.