FABRICATION METHOD OF CRTI UNDERLAYER FOR THE PROCESSING FEPT THIN FILM FOR MAGNETIC RECORDING MEDIA

摘要

A fabrication method of CrTi underlayer for the processing FePt thin film for magnetic recording media is provided to reduce the temperature of the manufacturing FePt thin film to 250.C by using CrTi alloy underlayer. An FePt magnetic thin film using the CrTi underlayer is comprised of steps: obtaining the optimum Ti composition from the CrTi alloyed thin film; obtaining the underlayer having the optimum thickness of the alloyed thin film; obtaining magnetic thin film from the underlayer having the optimum thickness. In the optimum composition of the CrTi underlayer, X is 5at.%-20at.%, and the thickness of the CrTi underlayer is 1nm~50nm range to optimize the process condition of low temperature vapor deposition.