| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming apparatus which has a simple structure that does not require a switching mechanism for cleaning the apparatus and the like, and can prevent fine particles from depositing in a pipe or a nozzle. SOLUTION: The film-forming apparatus comprises an aerosol-producing device 1 which has a circulation type transportation means having a groove 6a formed therein and a fine-particle-filling means 9 that fills the groove 6a with the fine particles, and an aerosol-spouting nozzle for spouting the aerosol onto a substrate, wherein the aerosol-generating device 1 has an intercepting means for intercepting the fine particles from being charged, in one part of the groove 6a. The intercepting means is a lid for covering the groove 6a or a slide gate installed in the fine-particle-filling means 9. COPYRIGHT: (C)2009,JPO&INPIT
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