| 摘要 |
PROBLEM TO BE SOLVED: To provide a bellows device of a slide table which can reduce the vibration due to a contact part, remarkably improve machine accuracy, especially, straightness accuracy, and extend an interval of exchange of the bellows. SOLUTION: A flexible bellows 1 for covering a guide rail 30 is provided between the one side 21 of a carriage 20 reciprocatably provided along the guide rail 30 of the slide table 3 and the one end 22 of the guide rail. A bellows support plate 13 for supporting a bellows support member 10 having one fixed ridge 11 of an end for every bellows 1 is disposed adjacent to a porous plate material 4 having a lot of air blowout holes not shown in the figure disposed on a base 31 of the guide rail 30. The air is supplied from an air supply port 18 to the porous plate material 4, and the bellows support plate 13 for supporting the bellows support member 10 is floated with respect to the base 31 of the guide rail 30 by the blowing air and noncontactingly supported in air. COPYRIGHT: (C)2009,JPO&INPIT
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