发明名称 Method of forming an isolation film in a semiconductor device
摘要 The present invention relates to an isolation film in a semiconductor device and method of forming the same. An isolation film is formed in a doped region of a peripheral region, in which the doped region is isolated from a deep well region of a cell region and the isolation film is thicker than an isolation film of the cell region so that a parasitic transistor is not generated and a leakage current can be prevented.
申请公布号 US7449400(B2) 申请公布日期 2008.11.11
申请号 US20050155747 申请日期 2005.06.20
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PARK SUNG KEE
分类号 H01L21/425 主分类号 H01L21/425
代理机构 代理人
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