| 摘要 |
PROBLEM TO BE SOLVED: To reduce remarkably a time necessary for a multi process testing accompanying a retesting process with a mechanical constitution equipped with the present testing devices as it is, with respect to the multi-process testing method and the multi-process testing device. SOLUTION: A process for carrying out a pre-testing process with respect to a tested substrate consisting of a plurality of chips, a process for producing the data of a next process while converting the testing terms of chips, determined so as to be faulty products in the pretesting process, into another testing terms and a process of next testing with respect to only the chips judged as good products in the pretesting process based on the data, are provided. COPYRIGHT: (C)2009,JPO&INPIT
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