| 摘要 |
<p>The installation has a mask (8) provided for formation of a sample (4). The mask comprises an electrode placed on a lower side of the mask and provided at the level of a traversing opening (10), for electrical interaction with nanoclusters e.g. gold clusters, passing through a surface (4a) of the sample. The electrode is provided close to the opening, so that electrons are emitted on arrival of the clusters on the surface of the sample, if the clusters are positively charged. A generator applies an adjustable electric voltage to the electrode. An independent claim is also included for a nanofabrication method.</p> |
