RECLAMATION DEVICE FOR COLOR FILTER SUBSTRATE AND RECLAMATION METHOD FOR COLOR FILTER SUBSTRATE

摘要

An apparatus of recycling a color filter substrate and method is provided to reduce the amount of wet chemistry component in standard color filter substrate production. In apparatus of recycling a color filter substrate and method, the UV irradiation portion irradiates UV on the color filter substrate.(S1) A plasma ash unit makes the color filter substrate an ash by using the plasma(S2). A color filter substrate is washed by water and dried in the dry unit(S3). A plasma ash unit makes one or more layer from the upper surface of the color filter substrate an ash.