| 摘要 |
An acceleration sensor includes at least one permanent magnet, a spring member for supporting the at least one permanent magnet to displace the at least one permanent magnet when an external force is applied, and a magnetic field detection sensor mounted in stationary state to face the at least one permanent magnet. The magnetic field detection sensor has at least one multi-layered MR element that includes a magnetization fixed layer and a magnetization free layer. The magnetization fixed layer is magnetized in a direction parallel to a displacement detection direction. Each permanent magnet has a multi-layered structure of hard magnetic material layers and nonmagnetic material layers alternately laminated each other in a direction perpendicular to a plane of the magnetic field detection sensor and to the magnetized direction of the magnetization fixed layer.
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