CHARGED PARTICLE BEAM DEVICE AND METHOD OF GENERATING CHARGED PARTICLE BEAM IMAGE

摘要

PROBLEM TO BE SOLVED: To eliminate an effect of electrostatic charge due to electron beam irradiation by a simple structure. SOLUTION: The effect of the electrostatic charge is eliminated or suppressed by varying the landing energy of the primary electron beam at the time of exchange of swing back of electronic line scanning. COPYRIGHT: (C)2009,JPO&INPIT